JPH0411195Y2 - - Google Patents

Info

Publication number
JPH0411195Y2
JPH0411195Y2 JP1986070557U JP7055786U JPH0411195Y2 JP H0411195 Y2 JPH0411195 Y2 JP H0411195Y2 JP 1986070557 U JP1986070557 U JP 1986070557U JP 7055786 U JP7055786 U JP 7055786U JP H0411195 Y2 JPH0411195 Y2 JP H0411195Y2
Authority
JP
Japan
Prior art keywords
moving
guide
plate
guides
precision
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986070557U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62182498U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986070557U priority Critical patent/JPH0411195Y2/ja
Publication of JPS62182498U publication Critical patent/JPS62182498U/ja
Application granted granted Critical
Publication of JPH0411195Y2 publication Critical patent/JPH0411195Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Details Of Measuring And Other Instruments (AREA)
JP1986070557U 1986-05-10 1986-05-10 Expired JPH0411195Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986070557U JPH0411195Y2 (en]) 1986-05-10 1986-05-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986070557U JPH0411195Y2 (en]) 1986-05-10 1986-05-10

Publications (2)

Publication Number Publication Date
JPS62182498U JPS62182498U (en]) 1987-11-19
JPH0411195Y2 true JPH0411195Y2 (en]) 1992-03-19

Family

ID=30912300

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986070557U Expired JPH0411195Y2 (en]) 1986-05-10 1986-05-10

Country Status (1)

Country Link
JP (1) JPH0411195Y2 (en])

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS618893U (ja) * 1984-06-22 1986-01-20 日本電子株式会社 試料移動装置

Also Published As

Publication number Publication date
JPS62182498U (en]) 1987-11-19

Similar Documents

Publication Publication Date Title
DE69702601T2 (de) Zweidimensionale balancierte positioniervorrichtung und mit dieser positioniervorrichtung ausgerüstete lithographische vorrichtung
KR100573663B1 (ko) 리소그래피장치용 위치결정 시스템
DE2942388A1 (de) Halbleiterplaettchen-positioniervorrichtung
JPS62229853A (ja) 平面状マイクロリソグラフイレチクル用の撓曲マウント
JP3450580B2 (ja) 露光装置および露光方法
JP2646412B2 (ja) 露光装置
KR101415371B1 (ko) 지지 장치 및 노광 장치
JPH0411195Y2 (en])
JP3719965B2 (ja) 位置合わせ装置及び位置合わせ方法
DE102019203838A1 (de) Projektionsbelichtungsanlage für die Halbleiterlithographie mit einem optischen Element mit Sensorreferenz und Verfahren zur Ausrichtung der Sensorreferenz
JP3068843B2 (ja) 露光装置の位置決め方法と位置決め機構
JPH09223650A (ja) 露光装置
JP2004074217A (ja) マーキング装置
JPH0310221B2 (en])
JPH04317Y2 (en])
JP2001125284A (ja) 分割逐次近接露光装置
JP3918932B2 (ja) Ｘ線ｃｔ装置における中心軸較正治具およびこの治具を用いた較正方法
JP2004349494A (ja) ワークステージ及びその位置測定方法、並びにこれを備えた露光装置
JP3658142B2 (ja) 計測方法およびデバイス製造方法
JP3542451B2 (ja) 精密ＸＹθステージのθ位置合せ方法
CN103454862B (zh) 用于光刻设备的工件台位置误差补偿方法
JP3184371B2 (ja) シングルプレート型ｘ−ｙテーブル装置
JPH04140691A (ja) 位置決め装置
DE102021127226B3 (de) Vorrichtung mit einem beweglichen Tischsystem sowie Verfahren zu dessen Kalibrierung und Betrieb
JPS60182444A (ja) 半導体露光装置